Erbium doped BaTiO 3 optical-waveguide films on Pyrex substrate was elaborated successfully through sol-gel method. BaTiO 3 is well crystallized when the film is annealed at 650 ℃ in air circumstance. The so-prepared films with 13 layers have comparatively lower refractive index than bulk BaTiO 3, and it can support two TM and TE modes. Photoluminescence and up-conversion luminescence spectra proved the successful doping of rare earth ions. Erbium doped BaTiO 3 optical-waveguide films on Pyrex substrate was elaborated successfully by sol-gel method. BaTiO 3 is well crystallized when the film is annealed at 650 ° C in air circumstance. The so-prepared films with 13 layers have comparatively lower refractive index than bulk BaTiO 3, and it can support two TM and TE modes. Photoluminescence and up-conversion luminescence spectra proved the successful doping of rare earth ions.