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本文利用微机电系统技术实现气敏传感器的主要思想,设计了基于超棱镜效应的光子晶体分光系统,它能够实现高精度的分光,使得光谱仪的分辨率有很大程度的提高,并且为应用于许多光学系统的新型分光元件的研究提供新的思路和基础.
In this paper, MEMS technology is used to realize the main idea of gas sensor, and a photonic crystal spectrometer system based on ultra-prismatic effect is designed. It can achieve high-precision spectroscopy and greatly improve the resolution of spectrometer. Many optical systems of new spectroscopic components provide new ideas and foundation.