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一、前言 无产阶级文化大革命和批林批孔运动,激发了战斗在电子工业战线上的广大工人革命干部和技术人员的革命积极性,促进了北京地区的中、大规模集成电路的大会战,推动了我厂中、大规模集成电路的研制和生产。 发展大规模集成电路,扩大电路的功能,不仅要提高电路单元的集成度,而且电路的单元面积也有所扩大。促使电子束,激光扫描、图形发生器等多种自动制版方式的出现。但是,由于设备庞大,造价昂贵,技术复杂,至今较难于普及应用。一般地刻大图照相制版方式,尽管在不断扩大幅面条件,也较难适应(高精度、大面积)发展中的大规模集成电路生产的需要。 一九七四年,中国科学院计算技术研究所开门办所,同我厂四车间工人、技术人员相结合,在车间党支部领导下,研制一种急需的大规模集成电路。由于掩模图纸面积大和电路单元尺寸大,无法按常规制版。针对这个问题,我们认真学习了毛主席关于“破除迷信,解放思想”和“独立自主,自力更生”的教导。决心“在自己力量的基点上”,开展大规模集成电路掩模的制版工作。 我们制版组,在六车间党支部的领导下,得到各兄弟车间的大力协助。立即组成了
I. Introduction The proletarian cultural revolution and the pro-xin campaign have stimulated revolutionary enthusiasm of a large number of revolutionary workers and technicians who fought on the front of the electronics industry, promoted the large-scale large-scale integrated circuit battle in Beijing and promoted the I plant, large-scale integrated circuit development and production. The development of large-scale integrated circuits, expanding the function of the circuit, not only to improve the integration of the circuit unit, and circuit unit area has also been expanded. Promote the emergence of electron beam, laser scanning, pattern generator and many other automatic plate making methods. However, due to its large equipment, high cost and complicated technology, it has hitherto been difficult to popularize. In general, large-format photolithography methods are difficult to adapt to (high-precision, large-area) production of large-scale integrated circuits in spite of the ever-expanding format conditions. In 1974, Institute of Computing Technology, Chinese Academy of Sciences opened its own office, combined with the workers of four workshops in our factory, and technical personnel. Under the leadership of workshop party branch, a much needed large-scale integrated circuit was developed. Due to the large area of the mask drawing and the large circuit unit size, it is not possible to make a plate according to the conventional method. In response to this question, we conscientiously studied Chairman Mao's teachings on “breaking superstition, emancipating the mind” and “being independent and self-reliance.” Determined “on the basis of their own strength,” to carry out large-scale integrated circuit mask platemaking. Our platemaking group, under the leadership of the Party Branch of the Six Workshop, has been greatly assisted by the brothers' workshops. Immediately formed