论文部分内容阅读
文中报导了用分子束外廷工艺在GaAs(211)B衬底上生长了较高质量的中、长波HgCdTe薄膜材料。生长后的材料通过退火进行转型和调节电性参数。选择的组分分别为x=0.330和0.226的两种材料,77K时载流子浓度和迁移率分别为p=6.7×1015cm-3、up=260cm2V-1s-1和4.45×1015cm-3、410cm2V-1s-1。研制了平面型中、长波线列光伏探测器,其典型的探测器D分别为5.0×1010cmHz1/2W-1和2.68×1010cmHz1/2W-1(180°视场下),其中64元线列中波探测器与CMOS电路芯片在杜瓦瓶中耦含后读出并实现了红外成像演示。
The paper reports the growth of high quality HgCdTe thin films on GaAs (211) B substrate by molecular beam epitaxy. The grown material is transformed by annealing and the electrical parameters are adjusted. The selected components were x = 0.330 and 0.226, respectively. The carrier concentration and mobility at 77K were p = 6.7 × 1015cm-3 and up = 260cm2V-1s-1 and 4 .45 × 1015 cm-3,410 cm 2 V-1 s-1. The planar mid-long wave array photovoltaic detector was developed. The typical detector D is 5.0 × 1010cmHz1 / 2W-1 and 2.68 × 1010cmHz1 / 2W-1 (180 ° field of view) The element line wave detector and the CMOS circuit chip are coupled in the Dewar bottle and read out and realize the infrared imaging demonstration.