研制波长移相干涉仪时为了选出满足干涉仪设计指标的激光器和CCD相机,采用直接计算法和蒙特卡罗法对干涉仪系统中的主要随机误差进行建模仿真。介绍了菲佐型波长移相干涉仪的基本结构和测量原理,对振动、空气扰动和激光光源不稳定性等随机误差进行了理论分析,建立了相应的数学模型。结合误差模型进行数值仿真,获得了各随机误差大小与测量结果之间的数值对应关系,完成了激光器和CCD相机的选型和误差分配。搭建了波长移相干涉仪实验装置并对其重复性进行测量。实验结果表明,搭建的波长移相干涉仪的均方根(RMS)重复性优于0.07nm,基本达到设计指标。 In order to select the lasers and CCD cameras that meet the design specifications of the interferometer when developing the wavelength phase-shifting interferometer, the direct calculation method and the Monte-Carlo method are used to simulate the main random errors in the interferometer system. The basic structure and measurement principle of the Fizo-type wavelength phase-shifting interferometer are introduced. The stochastic errors such as vibration, air disturbance and laser source instability are analyzed theoretically, and corresponding mathematical models are established. Combining the error model with the numerical simulation, the numerical correspondence between the magnitude of each random error and the measurement results was obtained, and the selection and error distribution of laser and CCD camera were completed. A wavelength phase-shifting interferometer experimental device was set up and its repeatability was measured. The experimental results show that the root mean square (RMS) repeatability of the constructed wavelength phase-shifting interferometer is better than 0.07nm, which basically meets the design criteria.