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通过等离子体源离子注入法(PSII),对带有SiC涂层的C纤维增强SiC基(SiCC/SiC)复合材料进行硼离子注入,研究了硼离子注入对样品抗氧化性能的影响。通过俄歇电子能谱检测分析了样品成份的深度分布。在空气中1300℃的高温条件下进行了氧化实验。通过XRD和扫描电镜分别对样品的化学组成和表面形貌进行了表征,对样品的力学性能进行了测试。结果表明,对SiCC/SiC复合材料注入硼有助于提高其抗氧化性能。经过离子注入试样的弯曲性能与未经离子注入试样相比变化很小。
Boron ion implantation was performed on the SiC-coated C fiber reinforced SiC-based (SiC / SiC) composites by plasma source ion implantation (PSII), and the effect of boron ion implantation on the oxidation resistance of the samples was investigated. The depth profile of the sample components was analyzed by Auger electron spectroscopy. In air at 1300 ℃ under high temperature oxidation experiments. The chemical composition and surface morphology of the samples were characterized by XRD and SEM, respectively. The mechanical properties of the samples were tested. The results show that the injection of boron into SiCC / SiC composites can improve the oxidation resistance of SiCC / SiC composites. The bending performance of the ion-implanted sample changed little compared with that of the non-ion-implanted sample.