论文部分内容阅读
基于激光的回馈效应可实现光学材料应力分布的测量,而系统外腔镜的非线性运动会引起测量结果的误差,影响系统的精度.利用高精度Nd:YAG激光回馈干涉仪对外腔镜的位移随时间的变化进行测量,采用高次拟合的方式得到位移与时间函数关系,并利用三镜腔等效模型的调谐曲线方程,对非线性运动引入的应力测量误差进行计算,实现对系统精度的修正.结果表明:外腔镜运动方向不同,引起的误差呈现相反的变化趋势;将不同方向的测量结果进行平均,可减小系统的测量误差.分析了外腔镜非线性运动带来的误差对系统测量精度的影响,提出了测量误差修正方法,对提高系统的测量精度具有重要意义.
Based on the feedback effect of laser, the stress distribution of optical material can be measured, and the non-linear movement of the system external mirror can cause the error of the measurement result, which affects the accuracy of the system. With the high precision Nd: YAG laser interferometer, Time variation, the relationship between displacement and time function is obtained by high-order fitting, and the tuning curve equation of the three-mirror equivalent model is used to calculate the stress measurement error introduced by nonlinear motion, The results show that the errors caused by the different direction of the external mirror movement show the opposite trend.The average measurement results in different directions can reduce the measurement error of the system.The errors caused by the non-linear movement of the external mirror are analyzed The impact of the system measurement accuracy, measurement error correction method proposed, to improve the measurement accuracy of the system is of great significance.