本工作对超导离子源(SECRAL)上的10~20 kV/q Ar16+和Ar17+入射到金属Zr表面进行实验研究。实验结果表明,高电荷态Ar16+在金属表面存在着多电子激发过程。Ar空心原子的K层发射X射线强度随入射离子的动能减少,靶原子Zr的L壳层发射X射线强度随入射离子动能的增加而增强。Ar17+单离子的K-αX射线产额比Ar16+单离子的K-αX射线产额大5个数量级。 In this work, 10 ~ 20 kV / q Ar16 + and Ar17 + on the superconducting ion source (SECRAL) were incident on the metal Zr surface. Experimental results show that the highly charged Ar16 + has a multi-electron excitation process on the metal surface. The X-ray emission intensity of K layer of Ar hollow atoms decreases with the kinetic energy of the incident ions, and the X-ray emission intensity of the L shell of the target atom Zr increases with the increase of incident ion kinetic energy. The K-α X-ray yield of Ar17 + ions was five orders of magnitude greater than the K-αX-ray yield of Ar16 + ions.