论文部分内容阅读
最近,Queensgate仪器有限公司研制出一系列超精定位机械,它们将Queensgate的压电及纳米级传感器技术融合为具有亚纳米级定位精度能力的多轴定位控制器。在这篇论文中,将介绍和讨论在这些机械的研制中所用到的一些技术,以解释如何获得纳米或亚纳米级水平的计量能力。
Queensgate Instruments recently developed a series of ultraprecision positioning machines that combine Queensgate’s piezoelectric and nanoscale sensor technologies into a multi-axis positioning controller with sub-nanometer positioning accuracy. In this paper, we will introduce and discuss some of the techniques used in the development of these machines to explain how to obtain nanometric or sub-nano-level metering capabilities.