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本文简介了KLY-1低能宽束离子源的结构,给出了物理设计的主要公式和调试实验的结果。对于氩离子束,在离子能量为4keV,距引出电极24cm处的5cm直径的靶上,测得最大氩离子流为45mA,束流不均匀性优于±25％。
In this paper, the structure of the KLY-1 low energy wide beam ion source is introduced. The main physical design formulas and the results of the commissioning experiments are given. For argon ion beams, a maximum argon ion flow of 45 mA was measured on a 5 cm diameter target with an ion energy of 4 keV 24 cm from the lead electrode, with a beam uniformity of better than ± 25%.