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近年来超硬涂层的出现,为高速切削、干式切削的高质量刀具的发展,提供了契机。本文开展了磁控溅射法制备TiAlSiN涂层的工艺研究,在不同工艺下,获得了厚度2.0~4.0μm的TiAlSiN涂层,运用纳米压入硬度测试仪、划痕仪和洛氏硬度计等对涂层性能进行表征,研究了制备工艺参数对涂层硬度、膜基结合力的影响规律。结果表明:随着氮氩比、沉积温度和基体负偏压的增大,纳米硬度和弹性模量都是先升高后降低。靶基距为8 cm、温度为100℃、氮氩比为1/3、靶电流为1.5 A、基体负偏压为-100 V时涂层的平均纳米硬度超过40 GPa,达到了超硬水平;涂层与高速钢基体的膜基结合力随着靶基距的加大而降低,随着磁控电流的增大而增大;在沉积温度和基体负偏压由低到高变化时,涂层结合力变化趋势一致,都是先升高后降低。
In recent years, the emergence of super-hard coatings for high-speed cutting, dry cutting of high-quality tools, provides an opportunity. In this paper, the preparation of TiAlSiN coating by magnetron sputtering has been studied. TiAlSiN coating with thickness of 2.0 ~ 4.0μm has been obtained under different process conditions. The nano-indenter hardness tester, scratch tester and Rockwell hardness tester The coating performance was characterized and the influence of the preparation parameters on the hardness and the bonding strength of the film was studied. The results show that with the increase of the ratio of nitrogen to argon, the deposition temperature and the substrate negative bias, the nano-hardness and the elastic modulus increase at first and then decrease. The average nanohardness of the coating was over 40 GPa at a substrate distance of 8 cm, a temperature of 100 ° C, a N / O ratio of 1/3, a target current of 1.5 A, and a substrate negative bias of -100 V, ; The bonding force between the coating and the high speed steel substrate decreases with the increase of the target distance, and increases with the increase of the magnetron current. When the deposition temperature and the substrate negative bias change from low to high, Cohesion changes in the same trend, are first increased and then decreased.