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采用频谱分析法,对磁流变去除函数的修形能力进行了分析研究,以此确定加工特定频谱范围的面形所需的去除函数尺寸。成功的加工了100×100mm的连续相位板,在6小时内将其误差面形RMS值加工到52nm。
Spectrum analysis is used to analyze the ability of MRF removal to determine the size of the removal function required to process the surface of a particular spectral range. The successful processing of a 100 × 100mm continuous phase plate, within 6 hours the error surface RMS value processed to 52nm.