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本文给出了利用JEET压阻效应设计C型硅杯的结构,分析了JEET的压阻效应,使电流性压力灵敏度可达2.5％/10~6dyn/cm~2,提出了一种有良好工作稳定性和噪声性能的力学量敏感器件——JEET力敏器件。
In this paper, the structure of the C-type silicon cup is designed by using JEET piezoresistive effect. The piezoresistive effect of JEET is analyzed to make the current pressure sensitivity up to 2.5% / 10 ~ 6dyn / cm ~ 2. Mechanics of stability and noise performance Sensitive devices - JETET sensitive devices.