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采用闭合场非平衡磁控溅射技术在不锈钢基体上制备了不同质量分数Mo的CrMoN复合涂层。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱仪(EDX)和光电子能谱仪(XPS),系统分析了CrMoN复合涂层的相结构、表面形貌、成分、原子化合价价态等,结果表明:添加Mo后,CrMoN涂层的择优取向由CrN涂层的(220)转变为(200),CrMoN涂层中的Mo原子取代了CrN晶格中的Cr原子,形成(Cr,Mo)N置换固溶体。采用Nano Test600硬度测试仪测定了CrMoN复合涂层的纳米硬度,结果表明:由于CrN相和MoN两种硬相的协同作用,使得CrMoN复合涂层的纳米硬度值增大。采用多功能摩擦磨损试验机测定了CrN涂层及CrMoN复合涂层的摩擦因数,结果表明:CrMoN复合涂层的摩擦因数低于CrN涂层,磨损过程中由于摩擦热反应生成大量MoO3,使得复合膜的摩擦因数降低,起到了一定的润滑效果,降低了磨损量。
The closed-field unbalanced magnetron sputtering technique was used to prepare CrMoN composite coatings with different mass fractions of Mo on a stainless steel substrate. The phase structure, surface morphology, composition and atomic valence of CrMoN composite coatings were systematically analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDX) and photoelectron spectroscopy (XPS) The results show that the preferred orientation of the CrMoN coating is changed from (220) to (200) in the CrNo coating and Mo atoms in the CrMoN coating replace the Cr atoms in the CrN lattice to form ( Cr, Mo) N replacement solid solution. The nano-hardness of the CrMoN composite coating was measured by the Nano Test600 hardness tester. The results show that the nano-hardness of the CrMoN composite coating increases due to the synergistic effect of the two hard phases. The friction coefficient of CrNoCo and CrMoN composite coatings was measured by multi-purpose friction and wear tester. The results showed that the friction coefficient of CrMoN composite coating was lower than that of CrN coating, and a large amount of MoO3 was generated during the frictional wear process, Film friction factor decreased, played a certain lubricating effect, reducing the amount of wear.