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拉曼光谱是研究化学气相沉积(CVD)金刚石最有效的手段之一。对不同晶粒尺寸的CVD金刚石膜进行了拉曼光谱分析。紫外拉曼光谱的检验表明,紫外光激发的拉曼光谱有效抑制了sp2碳的散射和荧光背景;1140cm-1峰出现在可见光拉曼光谱的原因是反聚乙炔的增多和sp2碳散射的增强。可见光拉曼光谱检测发现随着晶粒的减小,1140cm-1和1460cm-1峰强度增强,金刚石特征峰强度降低同时其半峰全宽(FWHM)变宽,薄膜中sp3碳含量减少;基体材料由硬质合金变为微米金刚石后,金刚石特征峰强度显著增加,FWHM有较大减小,非sp3碳成分含量明显减少。
Raman spectroscopy is one of the most effective means of studying CVD diamond. Raman spectroscopy was performed on CVD diamond films with different grain sizes. The results of UV-Raman spectroscopy showed that Raman spectrum excited by UV light effectively suppressed the sp2 carbon scattering and fluorescence background. The reason why 1140 cm-1 peak appeared in visible Raman spectrum was the increase of anti-polyacetylene and the increase of sp2 carbon scattering . Visible Raman spectroscopy showed that the intensity of 1140cm-1 and 1460cm-1 increased with the decrease of the grain size, the peak intensity of diamond decreased and the FWHM became wider, while the sp3 carbon content in the film decreased. After the material changed from cemented carbide to microdiamond, the characteristic peak intensity of diamond significantly increased, the FWHM decreased and the content of non-sp3 carbon decreased obviously.