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本文通过对霍尔传感器输出电压的实际测量,分析非线性误差的来源与特征,提出误差曲线拟合方法,采用多项式拟合法对测量数据进行修正,并在虚拟仪器平台上实现。一、测量误差分析霍尔传感器测量磁场的原理是基于霍尔效应,如图1所示。在长为l、宽为w、厚度为t的半导体芯片上,带电量为q载流子(电子或空穴)的迁移率为μP,密度为N。在磁场B和电场E影响下,产生平衡霍尔电场为EH=μPEB=RHJB(1)
In this paper, the actual measurement of Hall sensor output voltage, analysis of the source and characteristics of nonlinear error, error curve fitting method proposed, the use of polynomial fitting method to correct the measurement data and implemented in the virtual instrument platform. First, the measurement error analysis Hall sensor measuring the magnetic principle is based on the Hall effect, shown in Figure 1. On a semiconductor chip of length l, width w, and thickness t, the charge of q carriers (electrons or holes) has a mobility of μP and a density of N. Under the influence of magnetic field B and electric field E, a balanced Hall electric field is generated as EH = μPEB = RHJB (1)