设计并制作了一种基于激光直写技术的光学触摸传感器件。该器件采用光学微流结构实现对外加压力的连续比例测量。器件制作采用紫外激光直写技术配合高精度平移台实现,整体工艺过程在3min内完成。对所设计的传感器件的性能测试表明,光强信号随外力变化的曲线平滑,实测灵敏度为0.995mV/kPa。同时设计并制作了基于传感单元的阵列结构,不仅消除了光学累积误差,而且对集成化触摸传感的应用具有优势。 An optical touch sensor device based on laser direct writing technology was designed and fabricated. The device uses an optical microfluidic structure to achieve a continuous measurement of applied pressure. Device production using UV laser direct write technology with high precision translation stage to achieve the overall process within 3min to complete. The performance test of the designed sensor device shows that the curve of the light intensity signal changes smoothly with the external force, and the measured sensitivity is 0.995mV / kPa. At the same time, an array structure based on sensing unit is designed and fabricated, which not only eliminates the optical accumulation error but also has advantages for the application of integrated touch sensing.