提出一种基于激光间接冲击技术高效、高精度地制造微零件的新方法,采用激光冲击聚合物间接加载机制,结合不同形状的微模具,使用Nd:YAG-GAIA R激光器在厚度为35μm的钛板上实现了在单脉冲激光冲击作用下制造精密金属微零件。使用KEYENCE VHX-1000C超景深三维显微系统对成形的微零件进行观测,发现在合适的激光能量范围内,成形的微零件表面轮廓质量较好,且微零件的成形深度与微模具的凹坑深度基本一致。使用有限元分析方法对微零件的成形过程以及成形零件厚度的减薄率进行了数值模拟分析。从实验和模拟的结果可以看出,该成形方法可以在激光单次冲击作用下成形质量良好的微零件。 In this paper, a new method of manufacturing micro-parts based on laser indirect impact technology is proposed. The laser indirect impact loading mechanism of polymer is used in combination with micro-molds of different shapes. Nd: YAG-GAIA R laser The board enables the manufacture of precision metal micro-parts under the impact of a single pulse of laser light. The use of KEYENCE VHX-1000C depth of field 3D microscopy system to observe the formed micro-parts and found that in the appropriate laser energy range, the quality of the surface profile of the formed micro-parts is good, and the micro-parts forming depth and micro-mold pits Depth is basically the same. The forming process of the micro-parts and the thinning rate of the thickness of the formed parts were numerically simulated by finite element analysis. From the experimental and simulation results, it can be seen that the forming method can form good quality micro-parts under a single laser impact.