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金刚石膜和奖金刚石膜具有优异的力学特性、电气特性、光学特性、热学特性和化学稳定性。与金刚石膜相比,奖金刚石膜的制备工艺比较简单易行。因此,类金刚石膜很快进入成熟阶段。文中主要评述类金刚石膜的制备方法、性能、发展状况和在军民两方面的应用。简单介绍了前苏联在类金刚石膜的研究及应用方面所取得的使世人瞩目的进展。于70年代末,前苏联研制的类金刚石膜的硬度可达18000(维氏硬度),超过了金刚石的硬度(12000),并将其应用在陀螺动压轴承的表面优化上,研制成高精度的永不磨损型的陀螺动压马达。
Diamond film and Diamond film have excellent mechanical properties, electrical properties, optical properties, thermal properties and chemical stability. Compared with the diamond film, diamond film preparation process is relatively simple. Therefore, diamond-like carbon film quickly entered a mature stage. The paper mainly reviews the preparation, performance, development and applications of diamond-like carbon films. The progresses made by the former Soviet Union in the research and application of DLC films are briefly introduced. In the late 1970s, the DLC film developed by the former Soviet Union had a hardness of 18000 (Vickers hardness), exceeding the hardness of diamond (12000), and was applied to the surface optimization of the gyro-hydrodynamic bearing to develop a high-precision Never wear type of gyroscopic dynamic pressure motor.