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通过对JJG101-86《接触式干涉仪检定规程》和JJG53-86《0.2μm立式光学计检定规程》规定的接触式干涉仪和0.2μm立式光学计的示值检定误差分析及其两种仪器的精度构成,探讨了用3等量块代替2等量块对这两种仪器进行示值检定。
By the JJG101-86 “contact interferometer test procedures” and JJG53-86 “0.2μm vertical optical test procedures for the determination of” contact interferometer and 0.2μm vertical optical meter indication error analysis and two The accuracy of the instrument constitutes a discussion of the use of 3 equal blocks instead of 2 equal blocks for the indication of these two instruments.