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介绍在研制软X光激光用多层膜反射镜中发展起来的一套设计方法。给出了这类反射镜在现阶段所研究的部分X光激光波长下的设计结果。利用波动光学迭代方法模拟计算了反射镜的性能,并讨论了膜厚控制误差、表(界)面粗糙度等对性能的影响。
Introduced in the development of soft X-ray laser multilayer mirror developed in a set of design methods. The design results of this kind of mirror under the partial X-ray laser wavelength studied in this stage are given. The performance of the mirror was simulated by the wave optics iteration method. The influence of film thickness control error, surface roughness and so on on the performance was discussed.