论文部分内容阅读
为实现飞行时间二次离子质谱仪(TOF-SIMS)对二次离子束的提取并提高仪器的调试效率,采用离子光学仿真软件SIMION 8.0对TOF-SIMS二次离子光学系统进行仿真。以稳定同位素铜离子为对象,通过仿真,研究二次离子光学系统中二次离子提取系统透镜电极电压的调整对质量分辨率的影响,确定最佳透镜电极电压组合,并得到稳定同位素铜离子的仿真谱图。仿真研究表明:当初级提取电极电压为800 V、单透镜有效电极电压为-4 400 V时,质量分辨率最高。在TOF-SIMS实验平台上对铜样品靶进行实验测试,实验与仿真结果相吻合,表明设计的二次离子光学系统可用于TOF-SIMS仪器的二次离子束提取,为实验参数的选择提供参考,从而提高仪器调试效率。
In order to realize TOF-SIMS extraction of secondary ion beam and improve the debugging efficiency of the instrument, ion optical simulation software SIMION 8.0 was used to simulate TOF-SIMS secondary ion optical system. To stabilize the isotope copper ion, the influence of the adjustment of the lens electrode voltage in the secondary ion extraction system on the resolution of the mass in the secondary ion optical system was studied by simulation, and the optimal lens electrode voltage combination was determined and the stable isotope copper ion Simulation spectrum. The simulation results show that when the primary extraction voltage is 800 V and the effective voltage of the single lens is -4400 V, the mass resolution is the highest. The experiment of copper sample target is carried out on TOF-SIMS experiment platform. The experimental and simulation results are in good agreement. It shows that the designed secondary ion optical system can be used for secondary ion beam extraction of TOF-SIMS instrument, which can provide reference for the choice of experimental parameters. , So as to improve the efficiency of instrument debugging.