使用掺镱光子晶体光纤飞秒激光放大系统作为加工光源,利用激光诱导前向转移(LIFT)技术对铜膜进行加工,产生纳米结构。通过控制飞秒激光光源参数,得到不同纳米结构的金属薄膜。在功率较低时,能够得到纳米团簇;随着功率升高,团簇尺寸变大;到达一定功率时,出现纳米线结构。通过实验分析了飞秒激光与材料相互作用时发生的物理过程。利用该机理,对20,40,200nm三种厚度的铜膜在相同实验条件下的实验结果进行比较,获得了产生纳米团簇和纳米线结构薄膜的最佳条件。 Ytterbium-doped photonic crystal fiber femtosecond laser amplification system is used as the processing light source, and the LIFT technique is used to process the copper film to produce nanostructures. By controlling the parameters of the femtosecond laser source, the metal thin films with different nanostructures are obtained. At lower power, nanoclusters can be obtained; as the power increases, the size of the clusters becomes larger; and upon reaching a certain power, the nanowire structure appears. The physical process that occurs when the femtosecond laser interacts with the material is experimentally analyzed. Using this mechanism, the experimental results of copper films with thickness of 20, 40, and 200 nm under the same experimental conditions were compared and the optimum conditions for producing nanoclusters and nanowire films were obtained.