AFM Study of combinatorial Ga^＋ implanted Co7Ag93 film and its Kerr effect

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：mhappy

【摘要】

：

In this paper, a magnetooptic chip was prepared on Si wafer by combinatorial Ga+ implantation into ion sputtered Co7Ag93 film. The surface morphology of each un

【作者】

：

CAIYing－Wen LIAi－Guo 等

【机构】

：

SchoolofMaterialsScienceandEngineering,NuclearAnalysisLaboratory

【出处】

：

核技术：英文版

【发表日期】

：

2002年3期

【关键词】

：

Co-Ag薄膜 Ga^+移植 KERR效应 Combinatorial ion implantation AFM MOKE Surface morphol

【基金项目】

：

国家自然科学基金

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In this paper, a magnetooptic chip was prepared on Si wafer by combinatorial Ga+ implantation into ion sputtered Co7Ag93 film. The surface morphology of each unit of the chip was detected by AFM, while their Kerr effect was measnred by MOKE equipment. It

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AFM Study of combinatorial Ga^＋ implanted Co7Ag93 film and its Kerr effect

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