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在现有 Ｐｂ（Ｚｒ，Ｔｉ）Ｏ３（ＰＺＴ）铁电薄膜的制备工艺基础上，提出并设计了可集成在同一芯片上的基于ＰＺＴ铁电薄膜的压电型微麦克风、扬声器结构，对其灵敏度和声输出进行了理论计算。比较了基于 ＰＺＴ和 ＺｎＯ两种材料的微麦克风和扬声器的性能差异。
Based on the fabrication technology of the existing Pb (Zr, Ti) O3 (PZT) ferroelectric thin films, a piezoelectric microphones and speaker structures based on PZT ferroelectric thin films which can be integrated on the same chip are proposed and designed. Sensitivity and acoustic output were calculated theoretically. The performance differences between microphones and speakers based on PZT and ZnO are compared.