论文部分内容阅读
报道了原位红外吸收光谱在气相合成金刚石薄膜生长过程中的应用,研究了灯丝温度对原位红外吸收光谱和金刚石薄膜生长的影响。较高的灯丝温度使甲烷分解更充分,从而产生更多诸如C2H2等可能对金刚石薄膜生长有利的基团,导致金刚石薄膜质量和生长速率的提高。
The application of in situ infrared absorption spectroscopy to the growth of diamond films synthesized by gas phase synthesis was reported. The effects of filament temperature on in situ IR absorption spectra and the growth of diamond films were also investigated. Higher filament temperatures allow methane to be more fully decomposed, resulting in more groups such as C2H2 that may be beneficial for diamond film growth resulting in an increase in diamond film quality and growth rate.