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1原理电容式湿度传感器结构图如图1所示。在一陶瓷基片上涂一CrNi层，照相腐蚀成两排并列流状的电极．然后再涂卜一层厚度＜1μm的聚化物。盖板极不仅要保证电极的导电作用，而且还不能过份地防止水蒸汽扩散。因此，它的最佳厚度为10～20nm。这种传感器的基本电容值约为150pF。
1 Principle Capacitive humidity sensor structure shown in Figure 1. A ceramic substrate was coated with a layer of CrNi, photo-etched into two parallel rows of electrodes. Then apply a layer of polymer with a thickness <1μm. The cover must not only ensure the conductivity of the electrode, but also can not unduly prevent the diffusion of water vapor. Therefore, its optimal thickness is 10 ~ 20nm. The basic capacitance of this sensor is about 150pF.