在真空系统中利用加速器把电离的阳离子加速后,打入金属材料的表层内,以改变材料表面的物理化学性能的离子注入新技术,在材料科学研究中具有广阔的前途。国际上对金属表面离子注入的研究十分活跃,连续召开过“离子束材料改性”及“离子束分析”国际学术会议。离子注入的优点在于对任何元素的离子都可以利用注入技术,不受合金系统平衡相图的限制;可以获得其它常规方法无法制备的新型合金;注入层与基体材料之间无界面存在;注入后金属表面的光洁度和尺寸精度不变;注入的能量和剂量可以精确控制。离子注入使材料表面改性,包括化学改性,物理 In the vacuum system using accelerator to accelerate ionized cations, into the surface of metal materials to change the physical and chemical properties of the material surface of the ion implantation of new technologies in materials science has a bright future. The international research on metal surface ion implantation is very active, held a “ion beam material modification” and “ion beam analysis” international academic conference. The advantage of ion implantation is that the implantation technology can be used for the ions of any element without being limited by the equilibrium phase diagram of the alloy system; new alloys can not be prepared by other conventional methods; there is no interface between the injection layer and the matrix material; The finish and dimensional accuracy of the metal surface is constant; the injected energy and dose can be precisely controlled. Ion implantation surface modification of materials, including chemical modification, physical