用MonteCarlo (MC)方法对超薄膜外延生长过程进行了计算机模拟 .模型中引入Morse势描述粒子间的相互作用 ,考虑粒子的沉积、吸附粒子的扩散和蒸发三个过程 .研究了粒子间相互作用范围α和允许粒子行走的最大步数对薄膜生长形貌的影响 .结果表明 :在不同的α值下 ,随粒子行走步数的增加 ,薄膜的生长经历了从分散、分形、混合到团聚的过程 ;其中α=6时 ,基本观察不到粒子的分散生长过程 ;α值越小且粒子行走步数越小的情况下 ,薄膜越易趋向于分散生长 The Monte Carlo (MC) method was used to simulate the epitaxial growth of ultrathin films. The Morse potential was introduced to describe the interaction between particles and to consider the deposition of particles, the diffusion and adsorption of adsorbed particles, and the intermolecular interaction The range α and the maximum number of steps that the particles can walk on the growth morphology of the film.The results show that the growth of the film under the different α values ​​from dispersion, fractal, mixing to agglomeration The results showed that whenα = 6, the dispersed growth process of the particles was hardly observed. The smaller the value of α and the smaller number of walking steps, the easier the film was to grow dispersedly