用激光调整单片集成电路是半导体加工提出很久的一个问题。美国Teradyne公司提出一种特别适用于存贮器的检测方法,它能提高其加工效率和改进其特性分散性。有一种改进存贮器集成电路VLSI加工效率的简单方法,就是使用电路的多余行列对其修复。其过程是:首先测试集成电路,确定它的缺陷位置,然后对其修复。 Monolithic integrated circuits with lasers are a long-standing issue raised by semiconductor processing. The United States Teradyne company proposed a detection method particularly suitable for memory, which can improve its processing efficiency and improve its characteristic dispersion. There is a simple way to improve the VLSI processing efficiency of a memory integrated circuit by repairing it with extra lines of circuitry. The process is: First, test the IC, determine the location of its defects, and then repair it.