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Mueller矩阵成像偏振仪是测量材料和器件偏振特性的重要仪器,也是测量浸没光刻机偏振像差的检测仪器,该偏振仪由偏振态产生器和偏振态分析器组成。其组成中的λ/4波片相位延迟量误差及其快轴方位角误差与偏振片透光轴的方位角误差是影响Mueller矩阵成像偏振仪测量精度的主要误差源。通过对本课题组研制的Mueller矩阵成像偏振仪中5个主要误差因素进行标定和补偿,显著提高了其测量精度。利用傅里叶分析法获得各项傅里叶系数,并根据各个误差与傅里叶系数的关系,实现了这些误差的标定,即达到对Mueller矩阵成像偏振仪误差标定的目的。根据标定出的误差大小对Mueller矩阵成像偏振仪进行了补偿。实验结果表明,通过对器件参数误差标定和补偿,Mueller矩阵成像偏振仪的测量精度由0.2015提高到0.1051,提高了47.84%。最后用该Mueller矩阵成像偏振仪对一个物镜系统的偏振像差进行了测量,重复测量精度达到了1.1%。
Mueller Matrix Imaging Polarimeter is an important instrument for measuring the polarization characteristics of materials and devices. It is also a measuring instrument for measuring the polarization aberration of immersion lithography. The polarimeter consists of a polarization state generator and a polarization analyzer. The error of the phase retardation of λ / 4 wave plate and its azimuth error of fast axis and the azimuth error of the transmission axis of the polarizer are the main error sources that affect the measurement accuracy of Mueller matrix imaging polarimeter. By calibrating and compensating the five main error factors in the Mueller matrix imaging polarizer developed by our research group, the measurement accuracy is significantly improved. The Fourier coefficients were obtained by Fourier analysis. According to the relationship between each error and the Fourier coefficient, the calibration of these errors was realized, that is, the error calibration of Mueller matrix imaging polarizer was achieved. The Mueller matrix imaging polarizer is compensated based on the calibrated error. Experimental results show that the accuracy of Mueller matrix imaging polarizer is improved from 0.2015 to 0.1051 by 47.84%. Finally, the polarization aberration of an objective system was measured with the Mueller matrix imaging polarizer, and the repeatability of measurement accuracy reached 1.1%.