A fluoride-containing organic silane was synthesized by the reaction of N-ethyl-N-hydroxy-ethyl perfluorinated octyl sulfonamide(EHPOS),N-β-aminoethyl)-γ-aminopropyl trimethoxy silane(ATS)and cis-butenedioic anhydride(CA).The experimental results show that the yield of product is up to 87%when the molar ratio of EHPOS:CA:ATS is 1:1.05:1.1.EHPOS and CA were maintained at 115℃for 3 hours,then after cooling the reaction solution to 75℃,ATS was added and reacted for an-other 3.5 hours at 145℃.The structure of the productand thermal properties were characterized by Fourier transform infrared(FTIR)and thermogravimetric analysis(TGA),respectively.Results show that fluo-ride-containing organic silane has excellent thermal stability below 185℃.