利用针(needle)法优化技术,分别以两种不同厚度的高折射率单层膜为初始膜系,设计得到了平板偏振膜。当入射角为56°时,在中心波长1053 nm附近不小于20 nm的带宽范围内,偏振膜的p光反射率Rp<2%,s光反射率Rs>99.5%,且消光比(Tp/Ts)>200。角度特性分析结果表明,在入射角由53°增大至59°的过程中,两偏振膜的光学性能均满足设计要求,但偏振带却向短波长方向发生了移动,且带宽增大。根据蒙特卡罗容差分析,在各膜层膜厚误差独立的监控方式下,要保证成品率高于90%,则两偏振膜的最大容许膜厚标准偏差分别为1.20%和1.35%。 Using the needle method optimization technique, two kinds of high refractive index monolayers with different thicknesses were used as the initial film system, and the flat polarizing film was designed. When the incident angle is 56 °, the p-ray reflectance Rp <2% and the s-ray reflectance Rs> 99.5% of the polarizing film in the bandwidth of not less than 20 nm near the center wavelength of 1053 nm and the extinction ratio (Tp / Ts)> 200. The results of the analysis of the angle characteristics show that the optical properties of the two polarizing films meet the design requirements when the incident angle is increased from 53 ° to 59 °. However, the polarization band moves toward the short wavelength and the bandwidth increases. According to the Monte Carlo tolerance analysis, the standard deviation of the maximum permissible thickness of the two polarizing films is 1.20% and 1.35%, respectively, under the monitoring method of independent film thickness error of each film to ensure that the finished product yield is higher than 90%.