论文部分内容阅读
Rudolph Technologies公开发表了一部可以使用在微影和化学机械研磨工艺(CMP),并且具有 100%在线“巨观缺陷”实时检测功能的自动化系统。透过此机台,厂房人员将可以不再需要采用随机取样检测策略。
Rudolph Technologies publishes an automated system that can be used in lithography and chemical mechanical polishing (CMP) with 100% online “giants” real-time detection. Through this machine, plant personnel will no longer need to use random sampling test strategy.