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扫描电—声显微镜最近已在我们实验室研究制成功了,它是国际上近几年来发展起来的一种新的成像工具,它的成像机理是基于试样的微观热学和弹性性质的变化,特别是它具有非破坏性的亚表面剖面成像能力,这是常规扫描电镜所无法比拟的。本文主要介绍了扫描电一声显微镜的发展,工作原理,电—声成像的物理过程和优点。并显示了半导体材料、集成电路、金刚石复合片、硅片表面离子注入以及金属等试样的表面和亚表面电—声像,并与二次电子像作了比较,显示了电—声像的某些特点和潜在的应用价值。
Scanning electro-acoustic microscopy has recently been successfully developed in our laboratory. It is a new imaging tool developed in recent years. Its imaging mechanism is based on the microscopic thermal and elastic properties of the sample. In particular, it has nondestructive sub-surface profile imaging capabilities that are unmatched by conventional SEM. This article mainly introduces the development of Scanning Electron Microscope, the working principle, the physical process and advantages of electro-acoustic imaging. And shows the surface and subsurface electro-acoustic images of semiconductor materials, integrated circuits, diamond compacts, ion implantation of silicon surfaces, and metal samples, and compares them with secondary electron images to show that electro- Some characteristics and potential application value.