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采用直流磁控溅射设备制备ZnO/Al复合非晶硅电池背电极,在实际生产线上研究对比了使用ZnO/Al复合背电极与Al背电极的非晶硅电池性能,实验证明ZnO/Al复合背电极能提高太阳电池的短路电流和最大功率,并通过扩展实验验证了使用ZnO/Al复合背电极电池工艺稳定性较好,适合大规模非晶硅电池生产。
The DC / DC magnetron sputtering equipment was used to prepare the back electrode of ZnO / Al composite amorphous silicon battery. The performance of amorphous silicon battery using ZnO / Al composite back electrode and Al back electrode was compared on the actual production line. The experiment proved that ZnO / Al composite The back electrode can increase the short-circuit current and the maximum power of the solar cell. The experimental results show that the ZnO / Al composite back-electrode battery has better process stability and is suitable for large-scale amorphous silicon cell production.