We develop a fabrication process for the superconducting phase qubits in which Josephson junctions for both the qubit and superconducting quantum interference device (SQUID) detector are prepared by shadow evaporation with a suspended bridge.Al junctions with areas as small as 0.05 μm2 are fabricated for the qubit,in which the number of the decoherencecausing two-level systems (TLS) residing in the tunnel barrier and proportional to the junction area are greatly reduced.The measured energy spectrum shows no avoided crossing arising from coherent TLS in the experimentally reachable flux bias range of the phase qubit,which demonstrates the energy relaxation time T1 and dephasing time Tψ on the order of 100 ns and 50 ns,respectively.We discuss several possible origins of decoherence from incoherent or weakly-coupled coherent TLS and further improvements of the qubit performance.