论文部分内容阅读
1kHz的飞秒激光辐照在非晶硅薄膜后会使得辐照区域的薄膜产生晶化现象.拉曼光谱表明这个激光诱导晶化过程与入射激光的能量及其模式分布有密切的联系.扫描电镜观测发现激光辐照区域形成了粗糙的表面纹理,并且大量的晶粒形成在这个结构表面.这个晶化现象可能是由于爆炸晶化成核和晶粒外延生长共同作用的结果,进一步的研究表明这种飞秒激光诱导的晶化结构能够增进该薄膜在可见和红外波段的光学吸收.
1kHz femtosecond laser irradiation in the amorphous silicon film will cause the crystallization of the irradiated region of the crystallization phenomenon.Raman spectroscopy shows that the laser induced crystallization process and the incident laser energy and its mode distribution are closely related to the scanning Electron microscopy showed that rough surface texture was formed in the laser irradiated region and a large number of grains were formed on the surface of this structure.This crystallization phenomenon may be due to the combination of explosive crystallization nucleation and grain epitaxial growth. This femtosecond laser-induced crystallographic structure can enhance the optical absorption of the film in the visible and infrared bands.