Total-Ionizing-Dose-Induced Body Current Lowering in the 130 nm PDSOI I/O NMOSFETs

来源 :Chinese Physics Letters | 被引量 : 0次 | 上传用户:nd963852
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The body current lowering effect of 130 nm partially depleted silicon-on-insulator(PDSOI) input/output(I/O)n-type metal-oxide-semiconductor field-effect transistors(NMOSFETs) induced by total-ionizing dose is observed and analyzed. The decay tendency of current ratio of body current and drain current I_b/I_d is also investigated.Theoretical analysis and TCAD simulation results indicate that the physical mechanism of body current lowering effect is the reduction of maximum lateral electric field of the pinch-off region induced by the trapped charges in the buried oxide layer(BOX). The positive charges in the BOX layer can counteract the maximum lateral electric field to some extent. The body lowering lowering effect of 130 nm partially depleted silicon-on-insulator (PDSOI) input / output (I / O) n-type metal- oxide- semiconductor field-effect transistors (NMOSFETs) induced by total- ionizing dose is observed and The decay tendency of current ratio of body current and drain current I_b / I_d is also investigated. The optical analysis and TCAD simulation results indicate that the physical mechanism of body current lowering effect is the reduction of maximum lateral electric field of the pinch-off region induced by the trap charges in the buried oxide layer (BOX). The positive charges in the BOX layer can counteract the maximum lateral electric field to some extent.
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