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分析了球面透镜组成的聚焦系统加工微槽道存在的问题与困难。提出了用旋转棱镜作为激光加工的光学系统 ,该系统能产生无衍射光束 ,可使工件对位置误差的敏感度为零。
The problems and difficulties in processing microchannels in the focusing system composed of spherical lenses were analyzed. A rotating prism is proposed as an optical system for laser processing. The system can generate a non-diffracted beam and can make the workpiece less sensitive to position errors.