We present a transmission electron microscopy (TEM) investigation of a coupled cobalt and silver nanoparticle system.A plan view in situ lift-out method for preparing samples for TEM using the focused ion beam (FIB) microscope was used.This technique is used to prepare high quality TEM samples with site specificity in a short time and with a high success rate.We demonstrate the ability of the plan view sample preparation technique to provide information about an ordered system of nanoparticles which could not be observed using standard FIB cross sectioning of the sample.High resolution TEM and energy dispersive X-ray spectroscopy mapping of both cross sectional and plan view samples are presented,clearly showing the significant benefit of plan view TEM analysis for certain samples.