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基于等效媒质理论，用透反法确定了单靶溅射沉积的铝－氮复合膜的填充因子，并研究了不同填充因子复合膜以及由两层不同填充因子复合膜构成的干涉－吸收型选择性吸收涂层的热处理性能。结果表明，合理地选取复合膜的填充因子及厚度，可使刚沉积及经在真空中400℃，500℃保温1h热处理后的膜系的太阳吸收比α（AM2）＞0．94。80℃的法向发射比εn约0．04．α／εn＞20。
Based on the equivalent medium theory, the fill factor of Al-N composite film deposited by single target sputtering was determined by the transflective method. The effects of the different fill factor composite films and the two-layer composite film with different fill factors on the absorption- Selective absorption of the coating heat treatment performance. The results show that the reasonable choice of the filling factor and thickness of the composite membrane allows the solar deposition ratio α (AM2)> 0.94.80 ° C of the film system just after deposition and vacuum heat treatment at 400 ℃ and 500 ℃ for 1h The normalized emission ratio εn is about 0.04. α / εn> 20.