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本文研究了用汽相沉积法制备ＳｎＯ２气敏薄膜和ＳｎＯ２膜的光谱透过率气敏特性。用汽相沉积制备ＳｎＯ２的方法是利用一个密封的石英管系统，把ＳｎＣｌ４溶液置于系统内，氧气通人系统，然后系统升温使ＳｎＣｌ４气化，通过控制氧气流量、沉积温度和沉积时间等，使气化后的Ｓｎ原子与氧原子在一定条件下生成ＳｎＯ２，沉积在玻璃衬底上。本文用ＡＳ－４３０Ｓ俄歇式电子能谱仪测试膜片的主要成分，并用光栅单色仪测试了膜片在乙醇还原性气体中的气敏特性。实验结果表明：与热喷法制备的ＳｎＯ２膜比较，沉积法具有工艺重复性好，可以控制沉积膜的厚度，灵敏度高等优点。因此，可制备出有选择性的“气敏－光透过率”型气敏传感器。
In this paper, gas sensitivities of SnO2 gas sensing films and SnO2 films prepared by vapor deposition method were studied. The method of preparing SnO2 by vapor deposition is to use a sealed quartz tube system to put SnCl4 solution in the system and oxygen to pass through the system, and then the system is heated to vaporize SnCl4. By controlling the oxygen flow rate, deposition temperature and deposition time, So that the vaporized Sn atoms and oxygen atoms under certain conditions to generate SnO2, deposited on the glass substrate. In this paper, the AS-430S Auger electron spectrometer test the main components of the film, and the use of grating monochromator gas-sensing properties of the film in ethanol-reducing gas. The experimental results show that, compared with the SnO2 film prepared by thermal spraying, the deposition method has the advantages of good process repeatability, controllable thickness of the deposited film and high sensitivity. Therefore, a selective “gas sensor - light transmittance” gas sensor can be prepared.