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用转换电子的Mossbauer谱(CEMS)技术研究了注入B~+离子后多晶Fe膜的非晶化过程。由Mossbauer谱的拟合参数得到了在离子注入层中的非晶产额和它的超精细相互作用参数。用剥层的方法研究了非晶相在注入膜中的分布。研究了退火对膜中各相的影响和晶化后的相。
The Mossbauer spectroscopy (CEMS) technique was used to study the amorphization of polycrystalline Fe films after the implantation of B ~ + ions. The amorphous yield in the ion-implanted layer and its hyperfine interaction parameters are obtained from the fitting parameters of the Mossbauer spectrum. The delamination method was used to study the distribution of amorphous phase in the implanted film. The effect of annealing on each phase in the film and the phase after crystallization were investigated.