为保持器件结构紧凑型的同时获得稳定的高功率、高光束质量激光输出，将相移光学阵列谐振腔技术用于射频激励扩散型冷却板条波导ＣＯ２激光器．实验发现，该设计方案虽然波导结构为矩形宽波导，但是由于采用了具有相移阵列结构的全反射镜，获得的激光束输出空间分布具有阵列输出光束的基本特征．在波导截面为１ｍｍ×２０ｍｍ、增益介质长度为２０ｃｍ的波导结构条件下，获得了４６Ｗ的激光功率输出和１１３％的电光转换效率．激光束输出的远场空间分布呈空间压缩的极锐单峰．由于该结构具有的选模特性，远场为单峰空间分布特征的输出激光束具有很好的稳定性．建立了相应的理论模型并研究了实践中的可行性．研究了相移阵列谐振腔结构参数及其加工误差对激光器输出光束特性的影响，给出了该结构的加工误差容限 In order to obtain a stable, high-power, high-beam-quality laser output while maintaining a compact device structure, phase-shift optical array resonator technology is used for a radio-frequency excited diffusion-type cooled slab waveguide CO2 laser. The experimental results show that although the waveguide structure is a rectangular wide waveguide, the obtained laser beam output spatial distribution has the basic characteristics of an array output beam due to the use of a total reflection mirror with a phase-shift array structure. The waveguide power of 46W and the conversion efficiency of 113% were obtained under the waveguide structure with 1mm × 20mm waveguide and 20cm gain medium. The far-field spatial distribution of the laser beam output is an extremely sharp single peak compressed in space. Due to the mode-selecting properties of the structure, the far-field output laser beam with the characteristic of unimodal spatial distribution has good stability. Established the corresponding theoretical model and studied the feasibility in practice. The influence of the structural parameters of the phase-shift array resonator and its processing errors on the output beam characteristics of the laser is studied. The tolerance of the processing error of the structure