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为克服现有计量型扫描探针显微镜(SPM)测量范围小、测量速度低的不足,提出了快速共焦显微镜和SPM结合的大量程、高速、可溯源扫描显微镜,实现了一种大行程纳米定位系统,用于显微镜的扫描定位。系统包括伺服电机驱动的两维机械位移台和压电陶瓷(PZT)驱动的三维柔性铰链微动台,具有双伺服环运动控制机制,由双频激光干涉测量系统进行反馈和溯源。为抑制系统噪声,提高定位精度,设计了数字切比雪夫滤波器,将噪声减小85%。在100 mm×100 mm×20μm行程内,系统具有优于5 nm的定位精度和2 nm的分辨率。
In order to overcome the shortcoming of measurement range and low measurement speed of the existing metrological scanning probe microscope (SPM), a large-scale, high-speed and traceable scanning microscope combined with fast confocal microscope and SPM was proposed to achieve a large-travel nanometer Positioning system for microscope scanning positioning. The system consists of a servo motor driven two-dimensional mechanical stage and a piezoelectric ceramic (PZT) driven three-dimensional flexible hinge micro-motion table with dual servo loop motion control and feedback and traceability by a dual-frequency laser interferometry system. To suppress the system noise and improve the positioning accuracy, a digital Chebyshev filter is designed to reduce the noise by 85%. The system has better than 5 nm positioning accuracy and 2 nm resolution over a 100 mm × 100 mm × 20 μm stroke.