免标记、实时、高灵敏的生物检测是分析生物领域重要的技术。利用光波导模式理论构建生物传感器模型,设计了基于MEMS微镜的小型化生物传感检测系统,测试并分析了MEMS微镜的动态响应特性。通过计算仿真,得到了灵敏度与波导厚度和有效折射率之间的关系。以TE模式和TM模式进行葡萄糖溶液检测,实验结果表明,溶液浓度与入射角间呈现出良好的线性关系,灵敏度可达到5 ng/m L,相比传统的免疫学检测方法具有较高灵敏度。该方法由于检测系统体积小、结构简单、无标记,可实现原位检测,避免了对蛋白质活性的破坏,是一种具有较大潜力的蛋白质无标记光学检测方法。 Tag-free, real-time, highly sensitive bioassays are important technologies in the field of biological analysis. The biosensor model was constructed based on optical waveguide mode theory. A miniaturized biosensor system based on MEMS micromirror was designed. The dynamic response characteristics of MEMS micromirror were tested and analyzed. Through the calculation and simulation, the relationship between sensitivity and waveguide thickness and effective refractive index is obtained. The glucose solution was detected by TE mode and TM mode. The experimental results show that the concentration of the solution shows a good linear relationship with the incident angle, and the sensitivity can reach 5 ng / m L, which has higher sensitivity than traditional immunological detection methods. Due to its small size, simple structure and no marking, this method can detect in situ and avoid the damage to protein activity. It is a protein-labeled optical detection method with great potential.