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本文报道中试规模的直流等离子体化学气相沉积氮化钛(PCVDTiN)工艺及设备。设备外形尺寸为φ700×700mm,有效镀膜区为φ450×500mm。在此区域内,温度不均匀性小于20℃,TiN膜厚不均匀性小于15％。对TiN膜的硬度、生长速率、显微组织、晶体结构以及TiN膜的成分进行了研究。经测试及实际应用证明,高速钢麻花钻头用本工艺涂镀TiN膜后,可提高寿命8.3倍。其它刃具、模具、轴承等涂镀TiN后寿命也明显提高。
This paper reports the pilot-scale DC plasma CVD (CVD) titanium nitride (PCVDTiN) process and equipment. Equipment size is φ700 × 700mm, effective coating area is φ450 × 500mm. In this region, the temperature inhomogeneity is less than 20 ° C and the TiN film thickness inhomogeneity is less than 15%. The hardness, growth rate, microstructure, crystal structure and TiN film composition of TiN film were studied. After testing and practical application shows that high-speed steel twist drill bit coated with this process TiN film, can increase life expectancy of 8.3 times. Other cutting tools, molds, bearings and other coated TiN life is also significantly improved.