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采用溶胶-凝胶法制备Al-Sc共掺杂ZnO透明导电薄膜,考察了结晶性、晶界状态、紫外-可见光透射光谱及Hall效应,并讨论其掺杂机制,结果表明:Sc单独掺杂时,晶粒尺寸变小,结晶性变差,晶粒表面包裹一层非晶相,透射光谱存在较大的吸收谷,无导电性;Al-Sc共掺杂时,晶粒表面无非晶相,c轴择优取向性和晶界状态变优,透射光谱无大的吸收谷,载流子迁移率比Al掺杂ZnO薄膜增大约1个数量级。
Al-Sc co-doped ZnO transparent conductive films were prepared by sol-gel method. The crystallinity, grain boundary state, UV-Vis transmission spectrum and Hall effect were investigated. The doping mechanism was discussed. The results showed that: , The grain size becomes smaller and the crystallinity becomes worse. The surface of the grain is coated with an amorphous phase, and the transmission spectrum has a large absorption valley and no conductivity. When Al-Sc is co-doped, the crystal surface has no amorphous phase , the c-axis preferred orientation and the grain boundary state become better, and there is no large absorption valley in the transmission spectrum. The carrier mobility increases by about one order of magnitude compared with the Al-doped ZnO film.