6.引言得克萨斯仪器公司的标准液相外延流程包括把衬底插入熔体之前和之后的加热和冷却步骤。此外.流程的不同部分使用的冷却速率也不同。对于液相外延流程的更为详细的介绍发表存别的文章中,但有一点是显而易见的,即经过改进的温度控制应能产生更好的重复率,次与次之间的薄膜特性的变化应更小。 6. Introduction Texas Instruments’ standard liquid phase epitaxy process includes heating and cooling steps before and after insertion of the substrate into the melt. In addition, different sections of the process use different rates of cooling. A more detailed introduction to the liquid phase epitaxy process is published in a separate article, but it is clear that improved temperature control should result in better repetition rates, changes in sub-and secondary film properties Should be smaller.